Thumb-Sized MOEMS Mini-Spectrometer for Visible Light Spectrometry

28th April 2009
Posted By : ES Admin
Thumb-Sized MOEMS Mini-Spectrometer for Visible Light Spectrometry
Hamamatsu Photonics has introduced the C10988MA, an ultra-compact spectrometer built using MOEMS technology. The C10988MA is a thumb-sized device, measuring only 27.6 x 13 x 16.8 mm, developed for use in portable and hand-held devices, where a standard mini-spectrometer would be too large and consume too much power. Not only small, but the C10988MA is also light, weighing only 9 grams.
To achieve such a small size required the combination of Hamamatsu’s MEMS and image sensor technologies. The new device uses an aberration-corrected concave grating with a very short focal length, and a blazed grating profile for high diffraction efficiency. The grating is replicated onto the top of a convex glass lens using nano-print technology. Directly opposite the grating is placed a dedicated CMOS silicon image sensor with an on-chip slit. This 75 µm x 750 µm slit is formed into the CMOS chip using MEMS technology. The distance between the sensor and slit is only 1 mm, whilst the grating to image sensor distance a mere 8.5 mm.

Through the use of these novel techniques, the C10988MA can offer a spectral resolution of 12 nm in the wavelength range of 340 nm to 750 nm, making it ideal for a range of visible light applications requiring a miniaturised spectrometer head. This is Hamamatsu working at the forefront of today’s MOEMS technologies, to bring unique and exciting products to an ever demanding market.

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