The Hiden 3FD Fast-response Mass Spectrometer

The system integrates triple-stage mass filter technology with digital data acquisition by direct positive ion counting (pulse counting) to combine a continuous detection range of seven full decades with a detection rate from just 1 ion per second and abundance sensitivity measurements to the parts per billion
regime. The integral data accumulation mode enables operation with time-functioned data acquisition for suppression of fundamental ion statistical noise. Vacuum partial pressures to 5x10E-15 mbar are detectable.

Ionisation source options are available for conventional residual gas analysis, for surface desorption studies and for molecular/ laser beam measurements. Single-stage and multiple-stage pressure reduction systems are available for operation at higher pressures beyond the UHV range. Requirements for
measurement of externally generated positive ions and for measurement of both positive and negative ions are addressed by the alternative EP/EQ series. A custom design service is available for specialised applications.